Mg/Si(100) reconstructions studied by scanning tunneling microscopy

被引:0
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作者
Kubo, Osamu [1 ]
Saranin, Alexander A. [1 ,2 ,3 ]
Zotov, Andrey V. [1 ,2 ,4 ]
Harada, Toru [1 ]
Kobayashi, Tadashi [1 ]
Yamaoka, Nobumitsu [1 ]
Ryu, Jeong-Tak [1 ,5 ]
Katayama, Mitsuhiro [1 ]
Oura, Kenjiro [1 ]
机构
[1] Department of Electronic Engineering, Faculty of Engineering, Osaka University, Suita, Osaka 565-0871, Japan
[2] Inst. Automat. and Contr. Processes, 5 Radio Street, 690041 Vladivostok, Russia
[3] Faculty of Physics and Engineering, Far Eastern State University, 690000 Vladivostok, Russia
[4] Faculty of Electronics, Vladivostok Stt. Univ. Econ. Serv., 690600 Vladivostok, Russia
[5] Dept. of Comp. and Commun. Eng., Taegu University, 15 Naeri, Kyungsan, Kyungpook, 712-714, Korea, Republic of
关键词
Annealing - Crystal atomic structure - Crystal orientation - Dimers - Low energy electron diffraction - Magnesium - Molecular structure - Monolayers - Scanning tunneling microscopy - Silicon wafers - Surface phenomena - Surface structure;
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摘要
Using scanning tunneling microscopy (STM), the behavior of Mg submonolayers on a Si(100)2×1 surface has been studied during deposition at room temperature (RT) and upon annealing at 250 °C and 400 °C. RT-deposited Mg forms meandering chains of features that run roughly perpendicular to the substrate Si dimer rows and, at saturation, tend to form the arrays of the 2×2 reconstruction. Annealing at 250 °C transforms the chains to random groups of Mg clusters. Subsequent annealing at 400 °C induces Si redistribution at the surface and results in the formation of straight chains of features that are again aligned perpendicular to the Si dimer rows. These high-temperature (HT) features are plausibly composed of 1 Si atom and 1-2 Mg atoms. The spacing of the HT features within the chain is 2a (a = 3.84 angstroms) and stacking of the chains produces the domains of 2×2, 2×3 and other 2×n reconstructions. At saturation, almost the entire surface is occupied by the 2×2 reconstruction. At higher Mg coverages, the growth of a silicide occurs both at RT deposition and upon annealing.
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页码:3740 / 3743
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