Temperature measurement in rapid thermal processing using the acoustic temperature sensor

被引：0
|
作者：
Stanford Univ, Stanford, United States [1 ]
机构：
来源：
IEEE Trans Semicond Manuf | / 1卷 / 115-121期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Temperature measurement
引用
收藏
相关论文
共 50 条
  • [31] Low temperature PECVD polysilicon crystallization by rapid thermal processing
    Stewart, M
    Hovagimian, H
    Arakkal, J
    Saha, S
    Hatalis, MK
    FLAT-PANEL DISPLAY MATERIALS-1998, 1998, 508 : 109 - 114
  • [32] SIMULATION OF TEMPERATURE EFFECTS DURING RAPID THERMAL-PROCESSING
    KAKOSCHKE, R
    BUSSMANN, E
    RAPID THERMAL ANNEALING / CHEMICAL VAPOR DEPOSITION AND INTEGRATED PROCESSING, 1989, 146 : 473 - 482
  • [33] TEMPERATURE PROBLEMS WITH RAPID THERMAL-PROCESSING FOR VLSI APPLICATIONS
    KAKOSCHKE, R
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1989, 37-8 : 753 - 759
  • [34] A neural networks approach to control the temperature on rapid thermal processing
    Fortuna, L
    Muscato, G
    Nunnari, G
    Papaleo, R
    MELECON '96 - 8TH MEDITERRANEAN ELECTROTECHNICAL CONFERENCE, PROCEEDINGS, VOLS I-III: INDUSTRIAL APPLICATIONS IN POWER SYSTEMS, COMPUTER SCIENCE AND TELECOMMUNICATIONS, 1996, : 649 - 652
  • [35] EFFECT OF THERMAL RADIATION ON LOW TEMPERATURE MEASUREMENT FOR VARIOUS TYPES OF TEMPERATURE SENSOR INSTALLATIONS
    Pavel, Urban
    Pavel, Hanzelka
    Tomas, Kralik
    Ivan, Vlcek
    Ales, Srnka
    14TH CRYOGENICS 2017 IIR INTERNATIONAL CONFERENCE (CRYOGENICS 2017), 2017, : 498 - 501
  • [36] REMOTE TEMPERATURE-MEASUREMENT USING AN ACOUSTIC PROBE
    HUSSON, D
    BENNETT, SD
    KINO, GS
    APPLIED PHYSICS LETTERS, 1982, 41 (10) : 915 - 917
  • [37] Electro-thermal approach to thermal diffusivity measurement using silicon spreading resistance temperature sensor
    Gupta, R
    Tuli, S
    Bose, G
    SENSOR LETTERS, 2005, 3 (03) : 252 - 257
  • [38] Measurement of temperature distribution using acoustic reflector array
    Mizutani, Koichi
    Kawabe, Satoshi
    Saito, Ikumi
    Masuyama, Hiroyuki
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2006, 45 (5B): : 4516 - 4520
  • [39] Measurement of temperature distribution using acoustic reflector array
    Mizutani, Koichi
    Kawabe, Satoshi
    Saito, Ikumi
    Masuyama, Hiroyuki
    Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 2006, 45 (5 B): : 4516 - 4520
  • [40] RAPID MEASUREMENT OF TEMPERATURE DEPENDENCE OF THERMAL EMF AND ELECTRICAL CONDUCTIVITY
    MARKMAN, MA
    SIMANOVSKII, LM
    KHANIN, MA
    INDUSTRIAL LABORATORY, 1971, 37 (10): : 1551 - +
12345