EFFECT OF THERMAL RADIATION ON LOW TEMPERATURE MEASUREMENT FOR VARIOUS TYPES OF TEMPERATURE SENSOR INSTALLATIONS

We investigated an effect of thermal radiation (300 K) on precision of low temperature measurement of a sample holder (or sample) in an UHV SEM/SPM microscope working at range down to 20 K for various ways of temperature sensor mounting. We designed a special copper casing for installation of Lake Shore temperature sensors (Cernox (TM) and Si diodes) encapsulated in SD packages. The sensor body is attached direct to the casing using indium solder. The current leads pertaining to the sensor are thermally anchored but electrically insulated from the casing. Quality of sensors installation in the casing was tested for various ways of mounting on a cooled plate. Insufficient thermal anchoring of electrical wires and thermal shielding were imitated. Comparative measurement was also performed with sensors in SD package mounted without casing. The experiments proved that our special design of temperature sensors casing is adequate for intended application of temperature measurement of sample holder in UHV SEM/SPM microscope. In contrary, measurement precision of "unprotected" sensors was absolutely unsuitable.