ION BEAM SYSTEM FOR IMPLANTING INDUSTRIAL PRODUCTS OF VARIOUS SHAPES.

被引：0
|
作者：
Denholm, A.S. [1 ]
Wittkower, A.B. [1 ]
机构：
[1] Zymet Inc, Danvers, MA, USA, Zymet Inc, Danvers, MA, USA
来源：
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms | 1984年 / B6卷 / 1-2期
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6
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页码：88 / 93
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