ION BEAM SYSTEM FOR IMPLANTING INDUSTRIAL PRODUCTS OF VARIOUS SHAPES.

被引：0

作者：

Denholm, A.S. ^{[1
]}

Wittkower, A.B. ^{[1
]}

机构：

[1] Zymet Inc, Danvers, MA, USA, Zymet Inc, Danvers, MA, USA

来源：

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms | 1984年 / B6卷 / 1-2期

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页码：88 / 93

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