Empirical dielectric function of amorphous materials for spectroscopic ellipsometry

被引：0
|
作者：
Yamaguchi, T.
Kaneko, Y.
Jayatissa, A.H.
Aoyama, M.
Zotov, A.V.
Lifshits, V.G.
机构：
来源：
Journal of Applied Physics | 1995年 / 77卷 / 09期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [31] Complex dielectric function of ion implantation amorphized SiC determined by spectroscopic ellipsometry
    Lohner, T.
    Zolnai, Z.
    Petrik, P.
    Battistig, G.
    Garcia-Lopez, J.
    Morilla, Y.
    Koos, A.
    Osvath, Z.
    Fried, M.
    PHYSICA STATUS SOLIDI C - CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 5, NO 5, 2008, 5 (05): : 1374 - +
  • [32] UNAMBIGUOUS DETERMINATION OF THICKNESS AND DIELECTRIC FUNCTION OF THIN-FILMS BY SPECTROSCOPIC ELLIPSOMETRY
    ARWIN, H
    ASPNES, DE
    THIN SOLID FILMS, 1984, 113 (02) : 101 - 113
  • [33] Study on the dielectric function of the CdMgTe alloy by using vacuum ultraviolet spectroscopic ellipsometry
    Kim, T. J.
    Kim, Y. D.
    Kossut, J.
    JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2006, 49 (03) : 1156 - 1159
  • [34] Spectroscopic ellipsometry study of the influence of indium ion implantation on dielectric function of GaAs
    Kulik, Miroslaw
    Rzodkiewicz, Witold
    Zuk, Jerzy
    Komarov, Fadei. F.
    PRZEGLAD ELEKTROTECHNICZNY, 2008, 84 (03): : 196 - 199
  • [35] Dielectric function of germanium nanocrystals between 0.6 and 6.5 eV by spectroscopic ellipsometry
    Mansour, M.
    Naciri, A. En
    Johann, L.
    Duguay, S.
    Grob, J. J.
    Stchakovsky, M.
    Eypert, C.
    JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 2006, 67 (5-6) : 1291 - 1294
  • [36] A new model for the infrared dielectric function of amorphous materials
    Lynch, DK
    ASTROPHYSICAL JOURNAL, 1996, 467 (02): : 894 - 898
  • [37] Simulation of spectroscopic ellipsometry for dielectric lamellar gratings
    Watanabe, K
    Pistora, J
    Foldyna, M
    Postava, K
    Vlcek, J
    10TH INTERNATIONAL CONFERENCE ON MATHEMATICAL METHODS IN ELECTROMAGNETIC THEORY, CONFERENCE PROCEEDINGS, 2004, : 501 - 503
  • [38] Estimate of dielectric density using spectroscopic ellipsometry
    Davey, W.
    Buiu, O.
    Werner, M.
    Mitrovic, I. Z.
    Hall, S.
    Chalker, P.
    MICROELECTRONIC ENGINEERING, 2009, 86 (7-9) : 1905 - 1907
  • [39] Characterization of inhomogeneous dielectric films by spectroscopic ellipsometry
    Rivory, J
    THIN SOLID FILMS, 1998, 313 : 333 - 340
  • [40] Vibrational mode and dielectric function spectra of BGaP probed by Raman scattering and spectroscopic ellipsometry
    Rogowsky, S.
    Baeumler, M.
    Wolfer, M.
    Kirste, L.
    Ostendorf, R.
    Wagner, J.
    Liebich, S.
    Stolz, W.
    Volz, K.
    Kunert, B.
    JOURNAL OF APPLIED PHYSICS, 2011, 109 (05)
12345