共 50 条
- [23] PATTERN PROFILE CONTROL UTILIZING SHADOWING EFFECT IN OBLIQUE ION-BEAM ETCHING JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 19 (01): : 28 - 31
- [24] A COMBINED ELECTRON AND ION-BEAM LITHOGRAPHY SYSTEM JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1985, 3 (01): : 144 - 147
- [29] ION-BEAM CURRENT DEPENDENCE OF SECONDARY-ELECTRON EMISSION FROM THIN CARBON FOILS NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1986, 13 (1-3): : 627 - 630
- [30] ION-BEAM OF DIELECTRICS IN THE PULSED ION-SOURCE WITH EXPLOSIVE EMISSION REVIEW OF SCIENTIFIC INSTRUMENTS, 1994, 65 (04): : 1342 - 1344