Surface Wave Plasma Production Employing High-Permittivity Discharge Tube for Material Processing

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[1] Fujiwara, Kazuya
[2] Okuya, Tadayoshi
[3] Yanagisawa, Michihiko
[4] Shindo, Haruo
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Shindo, H. (hshindo@keyaki.cc.u-tokai.ac.jp) | 1600年 / Japan Society of Applied Physics卷 / 42期
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