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- [2] Ashing properties in a surface-wave mode plasma with a high-permittivity alumina window JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2001, 40 (10): : 5856 - 5860
- [3] Radio-frequency downstream plasma production by surface-wave in a very high-permittivity material discharge tube JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 2005, 44 (12-15): : L457 - L460
- [8] Surface wave plasma production employing high-permittivity material for microwave window JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 2001, 40 (11A): : L1179 - L1182
- [9] Surface wave plasma production employing high-permittivity material for microwave window Japanese Journal of Applied Physics, Part 2: Letters, 2001, 40 (11 A):