CALIBRATED DEFLECTION SYSTEM FOR ELECTRON BEAM TESTING.

被引：0

作者：

Brisegard, M. ^{[1
]}

Lidell, M. ^{[1
]}

Steier, S. ^{[1
]}

Stille, G. ^{[1
]}

机构：

[1] Swedish Inst of Microelectronics, Kista, Swed, Swedish Inst of Microelectronics, Kista, Swed

来源：

Microelectronic Engineering | 1987年 / 7卷 / 2-4期

关键词：

CAD-LAYOUT COORDINATES - CALIBRATED DEFLECTION SYSTEM - ELECTRON BEAM TESTING - POSTLENS MAGNETIC DEFLECTION UNIT - QUATITATIVE VOLTAGE CONTRAST;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

引用

页码：245 / 250

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