CALIBRATED DEFLECTION SYSTEM FOR ELECTRON BEAM TESTING.

被引：0
|
作者：
Brisegard, M. [1 ]
Lidell, M. [1 ]
Steier, S. [1 ]
Stille, G. [1 ]
机构：
[1] Swedish Inst of Microelectronics, Kista, Swed, Swedish Inst of Microelectronics, Kista, Swed
来源：
Microelectronic Engineering | 1987年 / 7卷 / 2-4期
关键词：
CAD-LAYOUT COORDINATES - CALIBRATED DEFLECTION SYSTEM - ELECTRON BEAM TESTING - POSTLENS MAGNETIC DEFLECTION UNIT - QUATITATIVE VOLTAGE CONTRAST;
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页码：245 / 250
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