Growth and characterization of hot-wall epitaxial InGaN films using mixed (Ga+In) source

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作者
Chu, Shucheng [1 ]
Saisho, Tetsuhiro [1 ]
Fujimura, Kazuo [2 ]
Sakakibara, Shingo [3 ]
Tanoue, Fumiyasu [3 ]
Ishino, Kenei [1 ]
Ishida, Akihiro [1 ]
Harima, Hiroshi [4 ]
Oka, Yasuo [5 ]
Takahiro, Katsumi [6 ]
Chen, Yefan [6 ]
Yao, Takafumi [6 ]
Fujiyasu, Hiroshi [1 ]
机构
[1] Faculty of Engineering, Shizuoka University, 3-5-1 Johoku, Hamamatsu 432-8561, Japan
[2] Susuki Corporation, Miyakoda Electronics Tech. Center, 1-1-2 Shinmiyakoda, Hamamatsu 431, Japan
[3] Yamaha Corporation, Iwata-gun, Shizuoka 438, Japan
[4] Department of Applied Physics, Osaka University, Yamadaoka, Suita, Osaka 565-0871, Japan
[5] Res. Inst. for Sci. Measurements, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan
[6] Institute for Materials Research, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan
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页码:4973 / 4979
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