Influence of the processing parameters on the piezoelectric properties of sputtered lead-based ferroelectric thin films

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作者
Jaber, B. [1 ]
Velu, G. [1 ]
Cattan, E. [1 ]
Tronc, P. [1 ]
Remiens, D. [1 ]
Thierry, B. [1 ]
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[1] Lab des Materiaux Avances Ceramiques, Maubeuge, France
来源
Integrated Ferroelectrics | 1997年 / 17卷 / 1 -4 pt 1期
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页码:329 / 338
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