Influence of the processing parameters on the piezoelectric properties of sputtered lead-based ferroelectric thin films

被引:0
|
作者
Jaber, B. [1 ]
Velu, G. [1 ]
Cattan, E. [1 ]
Tronc, P. [1 ]
Remiens, D. [1 ]
Thierry, B. [1 ]
机构
[1] Lab des Materiaux Avances Ceramiques, Maubeuge, France
来源
Integrated Ferroelectrics | 1997年 / 17卷 / 1 -4 pt 1期
关键词
D O I
暂无
中图分类号
学科分类号
摘要
引用
收藏
页码:329 / 338
相关论文
共 50 条
  • [21] Dielectric and piezoelectric properties of the lead-based perovskite ceramics
    Politova, ED
    Ivanova, VV
    Kaleva, GM
    Mosunov, AV
    Segalla, AG
    Stefanovich, SY
    Shvartsman, VV
    Kholkin, AL
    FERROELECTRICS, 2004, 313 : 129 - 133
  • [22] Structure and ferroelectric properties of sputtered PMNT thin films
    Wasa, K
    Kanno, I
    Suzuki, T
    Seo, SH
    Noh, DY
    Okino, H
    Yamamoto, T
    2004 14TH IEEE INTERNATIONAL SYMPOSIUM ON APPLICATIONS OF FERROELECTRICS-ISAF-04, 2004, : 11 - 16
  • [23] Ferroelectric, dielectric and piezoelectric properties of ferroelectric thin films and ceramics
    Damjanovic, D
    REPORTS ON PROGRESS IN PHYSICS, 1998, 61 (09) : 1267 - 1324
  • [24] Piezoelectric Properties of Sputtered AlN Thin Films and Their Applications
    Schmid, U.
    Sanchez-Rojas, J. L.
    SMART MATERIALS & MICRO/NANOSYSTEMS, 2009, 54 : 41 - 49
  • [25] Characterization of ferroelectric and piezoelectric properties of lead titanate thin films deposited on Si by sputtering
    Jaber, B
    Remiens, D
    Cattan, E
    Tronc, P
    Thierry, B
    SENSORS AND ACTUATORS A-PHYSICAL, 1997, 63 (02) : 91 - 96
  • [26] Local piezoelectric properties of oriented PZT based ferroelectric thin films
    Ricote, J.
    Leclerc, G.
    Chateigner, D.
    Ramos, P.
    Bouregba, R.
    Poullain, G.
    FERROELECTRICS, 2006, 335 : 191 - 199
  • [27] Ti and TiOx seeding influence on the orientation and ferroelectric properties of sputtered PZT thin films
    Millon, C
    Malhaire, C
    Barbier, D
    SENSORS AND ACTUATORS A-PHYSICAL, 2004, 113 (03) : 376 - 381
  • [28] Deposition and optical characterization of lead-based ferroelectric films or integrated optics
    Dogheche, E
    Remiens, D
    INTEGRATED FERROELECTRICS, 1999, 25 (1-4) : 411 - 422
  • [29] Deposition and optical characterization of lead-based ferroelectric films for integrated optics
    Dogheche, El-Hadj
    Remiens, Denis
    Integrated Ferroelectrics, 1999, 25 (01): : 71 - 82
  • [30] Influence of plasma parameters on the growth and properties of magnetron sputtered CNx thin films
    Hellgren, N
    Macák, K
    Broitman, E
    Johansson, MP
    Hultman, L
    Sundgren, JE
    JOURNAL OF APPLIED PHYSICS, 2000, 88 (01) : 524 - 532