Theory on high-vacuum planar magnetron discharge

被引：0
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作者：
Miura, Tsutomu [1 ]
Asakaki, Tatsuo [1 ]
机构：
[1] Science Univ of Tokyo, Tokyo, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes & Review Papers | 1997年 / 36卷 / 02期
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页码：787 / 791
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