Theory on high-vacuum planar magnetron discharge

被引：0

作者：

Miura, Tsutomu ^{[1
]}

Asakaki, Tatsuo ^{[1
]}

机构：

[1] Science Univ of Tokyo, Tokyo, Japan

来源：

Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes & Review Papers | 1997年 / 36卷 / 02期

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摘要：

引用

页码：787 / 791

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