Kinetic analysis of the growth of polycrystalline silicon from silane, using a rod-substrate CVD reactor

被引：0
|
作者：
Hashimoto, K. [1 ]
Miura, K. [1 ]
Masuda, T. [1 ]
Toma, M. [1 ]
Sawai, H. [1 ]
Kawase, M. [1 ]
机构：
[1] Kyoto Univ, Kyoto, Japan
来源：
International chemical engineering | 1992年 / 32卷 / 02期
关键词：
Silanes;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：360 / 369
相关论文
共 39 条
  • [31] Kinetic Analysis and Treatment of Compost Leachate Using Data from a Plant-Scale Hybrid Anaerobic Reactor
    Rajabi, Shima
    Vafajoo, Leila
    McKay, Gordon
    JOURNAL OF ENVIRONMENTAL ENGINEERING, 2020, 146 (07)
  • [32] Epitaxial Growth of 3C-SiC onto Silicon Substrate by VLS transport using CVD-grown 3C-SiC Seeding Layer
    Berckmans, Stephane
    Auvray, Laurent
    Ferro, Gabriel
    Cauwet, Francois
    Souliere, Veronique
    Collard, Emmanuel
    Quoirin, Jean-Baptiste
    Brylinski, Christian
    HETEROSIC & WASMPE 2011, 2012, 711 : 35 - +
  • [33] PHYSICAL AND CHEMICAL KINETIC PROCESSES IN THE CVD OF SILICON FROM SIH2CL2/H2 GASEOUS-MIXTURES IN A VERTICAL CYLINDRICAL HOT-WALL REACTOR
    LANGLAIS, F
    PREBENDE, C
    COUDERC, JP
    JOURNAL OF CRYSTAL GROWTH, 1991, 113 (3-4) : 606 - 632
  • [34] SUBSTRATE-DEPENDENT GROWTH OF POLYCRYSTALLINE SILICON FILMS PREPARED BY PLASMA-ENHANCED CHEMICAL-VAPOR-DEPOSITION USING SIF4 AND H-2 GASES
    CHOI, KY
    LEE, CW
    LEE, C
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1995, 34 (9A): : 4673 - 4676
  • [35] Kinetic analysis on the production of polyhydroxyalkanoates from volatile fatty acids by Cupriavidus necator with a consideration of substrate inhibition, cell growth, maintenance, and product formation
    Wang, Jin
    Yue, Zheng-Bo
    Sheng, Guo-Ping
    Yu, Han-Qing
    BIOCHEMICAL ENGINEERING JOURNAL, 2010, 49 (03) : 422 - 428
  • [36] Kinetic analysis for cyclic CO2 capture using lithium orthosilicate sorbents derived from different silicon precursors
    Zhao, Ming
    Fan, Hanlu
    Yan, Feng
    Song, Yinqiang
    He, Xu
    Memon, Muhammad Zaki
    Bhatia, Suresh K.
    Ji, Guozhao
    DALTON TRANSACTIONS, 2018, 47 (27) : 9038 - 9050
  • [37] Kinetic analysis of biogas produced from kitchen waste conducted using population growth and first order analytical models
    Feng, L.
    Gao, T. Y.
    Gu, S. Y.
    Kou, W.
    Gao, P.
    Dong, X. Y.
    Yu, M. L.
    Zhang, D. L.
    Wang, J. Z.
    BULGARIAN CHEMICAL COMMUNICATIONS, 2017, 49 : 64 - 68
  • [38] Delayed neutron library analysis using dynamic control rod calibration method based on results from the VR-1 reactor experiment and Serpent transient calculation
    Novak, Ondrej
    Sklenka, Lubomir
    Huml, Ondrej
    Maldonado, G. Ivan
    Chvala, Ondrej
    ANNALS OF NUCLEAR ENERGY, 2024, 207
  • [39] Xylose reductase from the basidiomycete fungus Cryptococcus flavus:: Purification, steady-state kinetic characterization, and detailed analysis of the substrate binding pocket using structure-activity relationships
    Mayr, P
    Petschacher, B
    Nidetzky, B
    JOURNAL OF BIOCHEMISTRY, 2003, 133 (04): : 553 - 562
1234