Refractive index measurement of silicon thin films using slab optical waveguides

被引：0
|
作者：
Waseda Univ, Tokyo, Japan [1 ]
机构：
来源：
Jpn J Appl Phys Part 1 Regul Pap Short Note Rev Pap | / 2卷 / 920-925期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [31] Characterization of graded refractive index silicon oxynitride thin films by spectroscopic ellipsometry
    Callard, S.
    Gagnaire, A.
    Joseph, J.
    Thin Solid Films, 1998, 313-314 (1-2): : 384 - 388
  • [32] REFRACTIVE INDEX PROFILE DETERMINATION IN OPTICAL WAVEGUIDES.
    Sabine, P.V.Harvey
    ATR, Australian Telecommunication Research, 1977, 11 (02): : 3 - 13
  • [33] Measurement of the refractive index of thin SiO2 films using tunneling current oscillations and ellipsometry
    Hebert, KJ
    Zafar, S
    Irene, EA
    Kuehn, R
    McCarthy, TE
    Demirlioglu, EK
    APPLIED PHYSICS LETTERS, 1996, 68 (02) : 266 - 268
  • [34] ON THE DETERMINATION OF REFRACTIVE INDEX AND THICKNESS OF THIN DIELECTRIC FILMS FROM MEASUREMENT OF TRANSMITTANCE
    Shah, Z. H.
    Ahmad, I.
    Tahir, Q. A.
    Khawaja, E. E.
    SURFACE REVIEW AND LETTERS, 2012, 19 (06)
  • [35] Measurement setup for the determination of the nonlinear refractive index of thin films with high nonlinearity
    Steinecke, Morten
    Kellermann, Tarik
    Jupe, Marco
    Ristau, Detlev
    Jensen, Lars
    LASER-INDUCED DAMAGE IN OPTICAL MATERIALS 2018, 2018, 10805
  • [36] REFRACTIVE-INDEX PROFILE MEASUREMENT OF COMPOUND THIN-FILMS BY ELLIPSOMETRY
    HO, JH
    LEE, CL
    LEI, TF
    ELECTRONICS LETTERS, 1989, 25 (16) : 1084 - 1086
  • [37] OPTICAL PROCESSES IN THIN-FILM LASERS AND WAVEGUIDES WITH ARBITRARILY DISTRIBUTED REFRACTIVE-INDEX
    KISELYOV, VA
    PROKHOROV, AM
    KVANTOVAYA ELEKTRONIKA, 1977, 4 (03): : 544 - 555
  • [38] MEASUREMENT OF TEMPORAL CHANGE IN REFRACTIVE-INDEX OF ZNS THIN-FILMS
    AOYAGI, T
    TOYODA, K
    NAMBA, S
    JAPANESE JOURNAL OF APPLIED PHYSICS, 1975, 14 (07) : 1095 - 1096
  • [39] Refractive Index Engineering With Subwavelength Gratings in Silicon Microphotonic Waveguides
    Schmid, J. H.
    Cheben, P.
    Bock, P. J.
    Halir, R.
    Lapointe, J.
    Janz, S.
    Delage, A.
    Densmore, A.
    Fedeli, J. -M.
    Hall, T. J.
    Lamontagne, B.
    Ma, R.
    Molina-Fernandez, I.
    Xu, D. -X.
    IEEE PHOTONICS JOURNAL, 2011, 3 (03): : 597 - 607
  • [40] Guided modes and light trapping in the negative-refractive-index slab waveguides
    Kim, Kyoung-Youm
    Lee, Il-Min
    Park, Junghyun
    Kang, Minsu
    Lee, Byoungho
    PHOTONIC FIBER AND CRYSTAL DEVICES: ADVANCES IN MATERIALS AND INNOVATIONS IN DEVICE APPLICATIONS II, 2008, 7056
12345