STUDY OF HYDROGENATED AMORPHOUS SILICON DEPOSITED BY rf GLOW DISCHARGE IN SILANE-HYDROGEN MIXTURES.

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作者：
Vanier, P.E. [1 ]
Kampas, F.J. [1 ]
Corderman, R.R. [1 ]
Rajeswaran, G. [1 ]
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[1] Division of Metallurgy and Materials Science, Brookhaven National Laboratory, Upton, NY 11973, United States
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| 1812年 / 56期
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