Solid-phase epitaxial regrowth and dopant activation of P-implanted metastable pseudomorphic Ge0.12Si0.88 on Si(100)

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Lie, D.Y.C.
Theodore, N.D.
Song, J.H.
Nicolet, M.-A.
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| 1600年 / American Inst of Physics, Woodbury, NY, USA卷 / 77期
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