CONCENTRATION-DEPENDENCE OF THE SOLID-PHASE EPITAXIAL-GROWTH RATE IN TE IMPLANTED SI

被引：12
|
作者：
CAMPISANO, SU
BARBARINO, AE
机构：
来源：
APPLIED PHYSICS | 1981年 / 25卷 / 02期
关键词：
D O I：
10.1007/BF00901288
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：153 / 155
页数：3
相关论文
共 50 条
  • [1] TEMPERATURE AND CONCENTRATION-DEPENDENCE OF EPITAXIAL-GROWTH RATE IN SB AND GA IMPLANTED SI
    CAMPISANO, SU
    CHU, TC
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1983, 31 (03): : 157 - 160
  • [2] IMPURITY AND CONCENTRATION-DEPENDENCE OF GROWTH-RATE DURING SOLID EPITAXY OF IMPLANTED SI
    CAMPISANO, SU
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1982, 29 (03): : 147 - 149
  • [3] SOLID-PHASE EPITAXIAL-GROWTH OF GAAS ON SI SUBSTRATES
    CHO, KI
    CHOO, WK
    PARK, SC
    NISHINAGA, T
    LEE, BT
    APPLIED PHYSICS LETTERS, 1990, 56 (05) : 448 - 450
  • [4] SOLID-PHASE TRANSPORT AND EPITAXIAL-GROWTH OF GE AND SI
    CANALI, C
    MAYER, JW
    OTTAVIANI, G
    SIGURD, D
    VANDERWE.W
    APPLIED PHYSICS LETTERS, 1974, 25 (01) : 3 - 5
  • [5] SOLID-PHASE EPITAXIAL-GROWTH OF GAAS ON SI(111)
    TAKANO, Y
    KANAYA, Y
    KAWAI, T
    TORIHATA, T
    PAK, K
    YONEZU, H
    APPLIED PHYSICS LETTERS, 1990, 56 (17) : 1664 - 1666
  • [6] KINETIC ASPECTS OF SOLID-PHASE EPITAXIAL-GROWTH OF AMORPHOUS SI
    LIAU, ZL
    LAU, SS
    NICOLET, MA
    MAYER, JW
    BLATTNER, RJ
    WILLIAMS, P
    EVANS, CA
    NUCLEAR INSTRUMENTS & METHODS, 1978, 149 (1-3): : 623 - 627
  • [7] SOLID-PHASE EPITAXIAL-GROWTH OF SI THROUGH AL FILM
    MAJNI, G
    OTTAVIANI, G
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1977, 124 (08) : C290 - C290
  • [8] SOLID-PHASE EPITAXIAL-GROWTH OF SI THROUGH A1 FILM
    MAJNI, G
    OTTAVIANI, G
    JOURNAL OF CRYSTAL GROWTH, 1978, 45 (01) : 132 - 137
  • [9] SOLID-PHASE EPITAXIAL-GROWTH OF SI THROUGH PALLADIUM SILICIDE LAYERS
    CANALI, C
    CAMPISANO, SU
    LAU, SS
    LIAU, ZL
    MAYER, JW
    JOURNAL OF APPLIED PHYSICS, 1975, 46 (07) : 2831 - 2836
  • [10] SUBSTRATE EFFECTS IN SI-AL SOLID-PHASE EPITAXIAL-GROWTH
    MAJNI, G
    OTTAVIANI, G
    STUCK, R
    THIN SOLID FILMS, 1978, 55 (02) : 235 - 242
12345