MODEL FOR WAFER FABRICATION DYNAMICS IN INTEGRATED CIRCUIT MANUFACTURING.

被引：0
|
作者：
Dayhoff, Judith E. [1 ]
Atherton, Robert W. [1 ]
机构：
[1] Judith Dayhoff & Associates Inc,, Mountain View, CA, USA, Judith Dayhoff & Associates Inc, Mountain View, CA, USA
来源：
IEEE Transactions on Systems, Man and Cybernetics | 1987年 / SMC-17卷 / 01期
关键词：
MATHEMATICAL MODELS - PROBABILITY - Queueing Theory - PRODUCTION ENGINEERING;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
A model is presented of the components and interactions of water movements, processing equipment, and process steps. The model considers multiple process flows, fabrication organization and layout, and equipment properties such as batch size, process time, failure, and repair distributions. The model is implemented as a discrete-event simulation and has been used in a number of case studies concerning realistic factory situations. This stimulation model is general and can be used to study many types of discrete manufacturing.
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页码：91 / 100
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