Large-area quartz glass microlens array fabricated by ion beam etching for focal plane detectors

被引：0
|
作者：
Zhang, Xinyu [1 ]
Yi, Xinjian [1 ]
He, Miao [1 ]
Zhao, Xingrong [1 ]
机构：
[1] Huazhong Univ of Science and, Technology, Wuhan, China
来源：
Hedongli Gongcheng/Nuclear Power Engineering | 1999年 / 20卷 / 01期
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(Edited Abstract)
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页码：97 / 101
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