Large-area quartz glass microlens array fabricated by ion beam etching for focal plane detectors

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作者
Zhang, Xinyu [1 ]
Yi, Xinjian [1 ]
He, Miao [1 ]
Zhao, Xingrong [1 ]
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[1] Huazhong Univ of Science and, Technology, Wuhan, China
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页码:97 / 101
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