Large-area quartz glass microlens array fabricated by ion beam etching for focal plane detectors

被引：0
|
作者：
Zhang, Xinyu [1 ]
Yi, Xinjian [1 ]
He, Miao [1 ]
Zhao, Xingrong [1 ]
机构：
[1] Huazhong Univ of Science and, Technology, Wuhan, China
来源：
Hedongli Gongcheng/Nuclear Power Engineering | 1999年 / 20卷 / 01期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
(Edited Abstract)
引用
收藏
页码：97 / 101
相关论文
共 50 条
  • [1] Large-area quartz glass microlens array fabricated by ion beam etching for focal plane detectors
    Zhang, XY
    Yi, XJ
    He, M
    Zhao, XR
    JOURNAL OF INFRARED AND MILLIMETER WAVES, 1999, 18 (02) : 97 - 102
  • [2] Large-area Quartz Glass Microlens Array Fabricated by lon Beam Etching for Focal Plane Detectors
    张新宇
    易新建
    何苗
    赵兴荣
    红外与毫米波学报, 1999, (02) : 3 - 8
  • [3] Large-area microlens arrays fabricated by Ar ion beam etching for infrared focal plane device
    Zhang, Xinyu
    Zhao, Xingrong
    Yi, Xinjian
    He, Miao
    Weixi Jiagong Jishu/Microfabrication Technology, 1998, (04): : 27 - 35
  • [4] Large-area refractive microlens and infrared focal plane structure
    Zhang, Xinyu
    Tang, Qingle
    Zhang, Zhi
    Yi, Xinjian
    Huazhong Ligong Daxue Xuebao/Journal Huazhong (Central China) University of Science and Technology, 2000, 28 (07): : 1 - 3
  • [5] Cylindrical microlens array fabricated by argon ion-beam etching
    Zhang, XY
    Tang, QL
    Yi, XJ
    Zhang, Z
    Pei, XD
    OPTICAL ENGINEERING, 2000, 39 (11) : 3001 - 3007
  • [6] Correction masks for large-area ion beam etching and figuring of optics
    Savvides, N
    JOURNAL OF APPLIED PHYSICS, 2006, 99 (09)
  • [7] Study on large-area array SW HgCdTe infrared focal plane device
    Gong X.
    Li H.
    Yang C.
    Yuan S.
    Feng Y.
    Huang Y.
    Hu X.
    Li L.
    Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering, 2022, 51 (09):
  • [8] Rapid Fabrication of Large-Area Concave Microlens Array on ZnSe
    Zhang, Fan
    Yang, Qing
    Bian, Hao
    Hou, Xun
    Chen, Feng
    MICROMACHINES, 2021, 12 (04)
  • [9] 128-x128-element silicon microlens array fabricated by ion beam etching for PtSi IRCCD
    Zhang, XY
    Yi, XJ
    He, M
    Zhao, XG
    INTEGRATED OPTOELECTRONICS II, 1998, 3551 : 191 - 198
  • [10] Fabrication of large-area concave microlens array on silicon by femtosecond laser micromachining
    Deng, Zefang
    Yang, Qing
    Chen, Feng
    Meng, Xiangwei
    Bian, Hao
    Yong, Jiale
    Shan, Chao
    Hou, Xun
    OPTICS LETTERS, 2015, 40 (09) : 1928 - 1931
12345