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- [3] LARGE-AREA ELECTRON-BEAM SOURCE JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1993, 11 (06): : 2304 - 2314
- [4] ELECTRON-BEAM SOURCES FOR PUMPING LARGE APERTURE KRF LASERS FUSION TECHNOLOGY, 1987, 11 (03): : 576 - 611
- [8] POLYSILICON DRY ETCHING BY A LARGE-AREA ELECTRON-BEAM APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1988, 45 (02): : 165 - 168