Numerical modeling of large-area electron-beam diodes for KrF lasers

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[1] Rose, D.V.
[2] Welch, D.R.
[3] 2,Hegeler, F.
[4] 2,Swanekamp, S.B.
[5] Myers, M.C.
[6] Sethian, J.D.
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Rose, D.V. (drose@mrcabq.com) | 1600年 / American Institute of Physics Inc.卷 / 94期
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Electron-beam diodes;
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摘要
Numerical modeling of large-area electron-beam diodes for KrF laser cells was performed. Estimates of energy deposition to the various components of the diode system were obtained. The global energy deposited in the KrF gas predicted from the simulations was in good agreement with experimental measurements for several different diode configurations.
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