THIN-FILM ELECTROLUMINESCENT DEVICE EMPLOYING TA2O5 RF SPUTTERED INSULATING FILM.

被引:0
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作者
KOZAWAGUCHI, HARUKI
TSUJIYAMA, BUNFIRO
MURASE, KEI
机构
来源
| 1600年 / V 21期
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中图分类号
O43 [光学]; Q436 [光感受器(视觉)]; T [工业技术];
学科分类号
070207 ; 08 ; 0803 ;
摘要
IN ORDER TO FABRICATE LOW-VOLTAGE-DRIVEN HIGH-BRIGHTNESS THIN-FILM ELECTROLUMINESCENT DEVICES, THE EMISSION CHARACTERISTICS OF DEVICES EMPLOYING LOW DIELECTRIC LOSS TA//2O//5 RF-SPUTTERED INSULATING FILMS HAVE BEEN STUDIED IN COMPARISON WITH THOSE OF DEVICES EMPLOYING Y//2O//3, SM//2O//3 AND AL//2O//3 DEPOSITED INSULATORS. IT WAS FOUND THAT THE DEVICES EMPLOYING TA//2O//5 RF-SPUTTERED FILMS EXHIBITED HIGHER BRIGHTNESS, LOWER DRIVING VOLTAGE AND HIGHER STABILITY THAN THE OTHER DEVICES. IN ADDITION, NO AGING WAS OBSERVED IN THE TA//2O//5 INSULATED DEVICES. THESE RESULTS INDICATE THAT THE TA//2O//5 RF-SPUTTERED FILM IS SUITABLE AS THE INSULATING FILM IN THIN-FILM ELECTROLUMINESCENT DEVICES, AND THAT THE PROPERTIES OF THE INSULATING FILM ARE CLOSELY RELATED TO THE EMISSIONCHARACTERISTICS IN SUCH DEVICES.
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