MOLECULAR DYNAMICS SIMULATION OF THE DAMAGE PRODUCTION IN Al (110) SURFACE WITH SLOW ARGON IONS.

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作者
Valkealhti, S. [1 ]
Nieminen, R.M. [1 ]
机构
[1] Univ of Jyvaskyla, Jyvaskyla, Finl, Univ of Jyvaskyla, Jyvaskyla, Finl
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ALUMINUM AND ALLOYS - Radiation Damage - PHYSICS - Molecular;
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摘要
We have developed a molecular dynamics simulation program to gain more insight into the sputtering process, especially the damage produced by it. We have studied the sputtering of aluminum (110) surface with argon ions. The Morse pair potential was used for Al-Al interaction, the Lennard-Jones potential for Ar-Ar interaction and both the Moliere potential and the universal potential of Ziegler et al. for Ar-Al interaction. An electronic friction term proportional to the particle velocities was also used.
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页码:365 / 369
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