Production of carbon clusters using plasma chemical vapor deposition in He/CH4 glow discharge

被引：0
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作者：
Sasaki, Suguru [1 ]
Kitagawa, Nobuhiko [1 ]
Takada, Noriharu [1 ]
Nagatsu, Masaaki [1 ]
机构：
[1] Nagoya Univ, Nagoya, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes & Review Papers | 1997年 / 36卷 / 12 A期
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页码：7399 / 7403
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