Rapid growth of diamond films by arc discharge plasma CVD

被引：0
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作者：
Akatsuka, Fumio [1 ]
Hirose, Yoichi [1 ]
Komaki, Kunio [1 ]
机构：
[1] Nippon Inst of Technology, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 1988年 / 27卷 / 09期
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页码：1600 / 1602
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