Technology of partially depleted CMOS/SOI

被引：0
|
作者：
Liu, Xin-Yu [1 ]
Sun, Hai-Feng [1 ]
Chen, Huan-Zhang [1 ]
Hu, Huan-Zhang [1 ]
Hai, Chao-He [1 ]
Liu, Zhong-Li [1 ]
He, Zhi-Jing [1 ]
Wu, De-Xin [1 ]
机构：
[1] Microelectron. Res. and Devmt. Cent., Chinese Acad. of Sci., Beijing 100029, China
来源：
Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors | 2001年 / 22卷 / 06期
关键词：
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学科分类号：
摘要：
CMOS integrated circuits
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页码：806 / 810
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