共 50 条
- [44] EXCIMER-LASER-ASSISTED RF GLOW-DISCHARGE DEPOSITION OF AMORPHOUS AND MICROCRYSTALLINE SILICON THIN-FILMS APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1994, 58 (05): : 507 - 512
- [48] Microstructure and electric transport characteristic of microcrystalline silicon films fabricated by very high frequency plasma enhanced chemical vapor deposition OPTOELECTRONIC MATERIALS, PTS 1AND 2, 2010, 663-665 : 600 - 603