Optical and transport studies on thin microcrystalline silicon films prepared by very high frequency glow discharge for solar cell applications

被引：0
|
作者：
Bulgarian Acad of Sciences, Sofia, Bulgaria [1 ]
机构：
来源：
J Appl Phys | / 11卷 / 7376-7385期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [21] IMPROVEMENT OF GRAIN-SIZE AND DEPOSITION RATE OF MICROCRYSTALLINE SILICON BY USE OF VERY HIGH-FREQUENCY GLOW-DISCHARGE
    FINGER, F
    HAPKE, P
    LUYSBERG, M
    CARIUS, R
    WAGNER, H
    SCHEIB, M
    APPLIED PHYSICS LETTERS, 1994, 65 (20) : 2588 - 2590
  • [22] ELECTRICAL-PROPERTIES AND DEGRADATION KINETICS OF COMPENSATED HYDROGENATED MICROCRYSTALLINE SILICON DEPOSITED BY VERY HIGH-FREQUENCY-GLOW DISCHARGE
    FLUCKIGER, R
    MEIER, J
    GOETZ, M
    SHAH, A
    JOURNAL OF APPLIED PHYSICS, 1995, 77 (02) : 712 - 716
  • [23] High rate deposition of amorphous silicon based solar cells using modified very high frequency glow discharge
    Yue, Guozhen
    Yan, Baojie
    Yang, Jeffrey
    Guha, Subhendu
    AMORPHOUS AND POLYCRYSTALLINE THIN-FILM SILICON SCIENCE AND TECHNOLOGY 2007, 2007, 989 : 359 - 364
  • [24] Microcrystalline silicon films prepared by very high frequency plasma enhanced chemical vapor deposition at low temperature
    Wu, ZM
    Lei, QS
    Xi, JP
    Ying, Z
    Geng, XH
    INTERNATIONAL JOURNAL OF MODERN PHYSICS B, 2005, 19 (18): : 3013 - 3020
  • [25] The effect of initial discharge conditions on the properties of microcrystalline silicon thin films and solar cells
    陈永生
    杨仕娥
    汪建华
    卢景霄
    郜小勇
    谷锦华
    Chinese Physics B, 2010, 19 (05) : 509 - 514
  • [26] The effect of initial discharge conditions on the properties of microcrystalline silicon thin films and solar cells
    Chen Yong-Sheng
    Yang Shi-E
    Wang Jian-Hua
    Lu Jing-Xiao
    Gao Xiao-Yong
    Gu Jin-Hua
    CHINESE PHYSICS B, 2010, 19 (05) : 0572051 - 0572056
  • [27] Optical absorption and light scattering in microcrystalline silicon thin films and solar cells
    Poruba, A
    Fejfar, A
    Remes, Z
    Springer, J
    Vanecek, M
    Kocka, J
    Meier, J
    Torres, P
    Shah, A
    JOURNAL OF APPLIED PHYSICS, 2000, 88 (01) : 148 - 160
  • [28] Optical absorption and light scattering in microcrystalline silicon thin films and solar cells
    1600, American Institute of Physics Inc. (88):
  • [29] Electrical transport properties of microcrystalline silicon thin films prepared by Cat-CVD
    Liu, F
    Zhu, M
    Feng, Y
    Han, Y
    Liu, J
    THIN SOLID FILMS, 2001, 395 (1-2) : 97 - 100
  • [30] Electronic transport properties of microcrystalline silicon thin films prepared by VHF-PECVD
    S. Okur
    M. Güneş
    O. Göktaş
    F. Finger
    R. Carius
    Journal of Materials Science: Materials in Electronics, 2004, 15 : 187 - 191
12345