Particle and heat transport in a low-frequency inductively coupled plasma

被引:0
|
作者
机构
来源
Phys Plasmas | / 4卷 / 1198期
关键词
D O I
暂无
中图分类号
学科分类号
摘要
引用
下载
收藏
相关论文
共 50 条
  • [1] Particle and heat transport in a low-frequency inductively coupled plasma
    Tuszewski, M
    PHYSICS OF PLASMAS, 1998, 5 (04) : 1198 - 1205
  • [2] Characterization of a low-frequency inductively coupled plasma source
    Tuszewski, M
    Tobin, JA
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1996, 14 (03): : 1096 - 1101
  • [3] Hysteresis and mode transitions in a low-frequency inductively coupled plasma
    Xu, S
    Ostrikov, KN
    Luo, W
    Lee, S
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2000, 18 (05): : 2185 - 2197
  • [4] Low-frequency ferromagnetic enhanced inductively coupled plasma for plasma-assisted nitriding
    Isupov, M. V.
    Pinaev, V. A.
    ALL-RUSSIAN CONFERENCE XXXIV SIBERIAN THERMOPHYSICAL SEMINAR, DEDICATED TO THE 85TH ANNIVERSARY OF ACADEMICIAN A. K. REBROV, 2018, 1105
  • [5] One-dimensional numerical model of a low-frequency inductively coupled plasma
    Demin, N. A.
    Fedoseev, A., V
    Pinaev, V. A.
    Isupov, M., V
    Sukhinin, G., I
    3RD ALL-RUSSIAN SCIENTIFIC CONFERENCE THERMOPHYSICS AND PHYSICAL HYDRODYNAMICS WITH THE SCHOOL FOR YOUNG SCIENTISTS, 2018, 1128
  • [6] Experimental and numerical study of a low-frequency ferromagnetic enhanced inductively coupled plasma
    Isupov, M., V
    Fedoseev, A., V
    Sukhinin, G., I
    Pinaev, V. A.
    ALL-RUSSIAN CONFERENCE XXXIV SIBERIAN THERMOPHYSICAL SEMINAR, DEDICATED TO THE 85TH ANNIVERSARY OF ACADEMICIAN A. K. REBROV, 2018, 1105
  • [7] LOW-FREQUENCY WAVES STABILIZATION, AND PARTICLE TRANSPORT IN AN HCD PLASMA
    WHEELER, GM
    PYLE, RV
    BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1972, 17 (11): : 1012 - 1012
  • [8] Novel low-frequency oscillation in a radio-frequency inductively coupled plasma with tuned substrate
    Ding, ZF
    Huo, WG
    Wang, YN
    PHYSICS OF PLASMAS, 2004, 11 (06) : 3270 - 3277
  • [9] Plasma-Assisted Nitriding in Low-Frequency Inductively Coupled Plasma Enhanced with Ferromagnetic Cores
    Isupov, Mikhail
    Pinaev, Vadim
    Mul, Daria
    Belousova, Natalia
    HIGH TEMPERATURE MATERIALS AND PROCESSES, 2018, 37 (06) : 545 - 550
  • [10] Diagnostics and simulation of low-frequency inductively coupled plasmas
    Ostrikov, KN
    Denysenk, IB
    Tsakadze, EL
    Xu, S
    Azarenkov, NA
    Storer, RG
    PLASMA PHYSICS, 2003, 669 : 71 - 74