Particle and heat transport in a low-frequency inductively coupled plasma

被引:0
|
作者
机构
来源
Phys Plasmas | / 4卷 / 1198期
关键词
D O I
暂无
中图分类号
学科分类号
摘要
引用
收藏
相关论文
共 50 条
  • [31] The fabrication and application of ZnO:Al thin films in low-frequency inductively coupled plasma fabricated silicon solar cell
    Yan, W. S.
    Ong, T. M.
    Zhou, H. P.
    Xu, S.
    THIN SOLID FILMS, 2012, 520 (23) : 6900 - 6904
  • [32] Heat Transfer During Radio Frequency Inductively Coupled Plasma Deposition of Tungsten
    蒋显亮
    M.I.BOULOS
    Plasma Science and Technology, 2007, (04) : 427 - 430
  • [33] Heat Transfer During Radio Frequency Inductively Coupled Plasma Deposition of Tungsten
    蒋显亮
    MIBOULOS
    Plasma Science and Technology, 2007, 9 (04) : 427 - 430
  • [34] Low-temperature deposition of μc-Si : H thin films by a low-frequency inductively coupled plasma for photovoltaic applications
    Wei, D. Y.
    Xiao, S. Q.
    Huang, S. Y.
    Chan, C. S.
    Zhou, H. P.
    Xu, L. X.
    Guo, Y. N.
    Chai, J. W.
    Wang, S. J.
    Xu, S.
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2013, 46 (21)
  • [35] Highly doped p-type microcrystalline silicon thin films fabricated by a low-frequency inductively coupled plasma at a low temperature
    Yan, W. S.
    Wei, D. Y.
    Xu, S.
    Sern, C. C.
    Zhou, H. P.
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2011, 44 (34)
  • [36] Controlled particle generation in an inductively coupled plasma
    Schulze, M
    von Keudell, A
    Awakowicz, P
    APPLIED PHYSICS LETTERS, 2006, 88 (14)
  • [37] Low-frequency dependence of plasma characteristics in dual-frequency capacitively coupled plasma sources
    Zhou, Yang
    Zhao, Kai
    Ma, Fang-Fang
    Liu, Yong-Xin
    Gao, Fei
    Schulze, Julian
    Wang, You-Nian
    APPLIED PHYSICS LETTERS, 2024, 124 (06)
  • [38] Theory of plasma transport induced by low-frequency hydromagnetic waves
    Chen, L
    JOURNAL OF GEOPHYSICAL RESEARCH-SPACE PHYSICS, 1999, 104 (A2) : 2421 - 2427
  • [39] Simulation of flow field and particle trajectory of radio frequency inductively coupled plasma spheroidization
    Lu Xin
    Zhu Lang-ping
    Zhang Bing
    Zhang Rui-jie
    He Xin-bo
    Qu Xuan-hui
    COMPUTATIONAL MATERIALS SCIENCE, 2012, 65 : 13 - 18
  • [40] ENERGY-TRANSPORT IN THE INDUCTIVELY COUPLED PLASMA
    RODHAM, DA
    SHURTLEFF, JK
    FARNSWORTH, PB
    MIKROCHIMICA ACTA, 1989, 3 (3-6) : 187 - 195