Particle and heat transport in a low-frequency inductively coupled plasma

被引：36
|
作者：
Tuszewski, M [1 ]
机构：
[1] Los Alamos Natl Lab, Los Alamos, NM 87545 USA
来源：
PHYSICS OF PLASMAS | 1998年 / 5卷 / 04期
关键词：
D O I：
10.1063/1.872649
中图分类号：
O35 [流体力学]; O53 [等离子体物理学];
学科分类号：
070204 ; 080103 ; 080704 ;
摘要：
The radial profiles of induced radio frequency magnetic fields, of plasma density, and of electron temperatures are measured in low-frequency inductively coupled plasmas. Oxygen and argon data are compared to one-dimensional fluid calculations that Include time-averaged induced magnetic fields. These comparisons suggest that the induced magnetic fields broaden the profiles of input radio frequency power, somewhat flatten the density profiles, and produce an electron temperature increase in the edge region of oxygen discharges. (C) 1998 American Institute of Physics.
引用
收藏
页码：1198 / 1205
页数：8
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