Synthesis and structural characterization of a novel magnesium β-diketonatoalkoxide complex: a new precursor for the MOCVD of MgO

被引：0
|
作者：
Davies, H.O. [1 ]
Jones, A.C. [2 ]
Leedham, T.J. [3 ]
Crosbie, M.J. [1 ]
Wright, P.J. [3 ]
Boag, N.M. [1 ]
Thompson, J.R. [2 ]
机构：
[1] Inorgtech Limited, 25 James Carter Road, Mildenhall, Suffolk IP28 7DE, United Kingdom
[2] Defence, Evaluation and Research Agency, St. Andrews Road, Worcestershire WR14 3PS, United Kingdom
[3] Department of Chemistry, University of Salford, Salford M5 4WT, United Kingdom
来源：
Advanced Materials | 2000年 / 12卷 / 07期
关键词：
Auger electron spectroscopy - Carbon - Film growth - High temperature operations - Magnesium compounds - Structure (composition) - Synthesis (chemical) - Thin films - X ray crystallography;
D O I：
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学科分类号：
摘要：
The tetrameric magnesium complex [Mg(thd)(μ3-OMe)(MeOH)]4 (thd = 2,2,6,6-tetramethylheptane-3,5-dionate), 1, has been synthesized and its structure determined by X-ray crystallography. Thin films of magnesium oxide, MgO, have been deposited by liquid-injection MOCVD using tetrahydrofuran solutions of 1. The films were deposited at substrate temperatures of between 500 and 600°C and, under optimum growth conditions, were shown by Auger electron spectroscopy to be pure magnesium oxide with no detectable carbon.
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页码：71 / 75
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