Synthesis and structural characterization of a novel magnesium β-diketonatoalkoxide complex: a new precursor for the MOCVD of MgO

被引：0
|
作者：
Davies, H.O. [1 ]
Jones, A.C. [2 ]
Leedham, T.J. [3 ]
Crosbie, M.J. [1 ]
Wright, P.J. [3 ]
Boag, N.M. [1 ]
Thompson, J.R. [2 ]
机构：
[1] Inorgtech Limited, 25 James Carter Road, Mildenhall, Suffolk IP28 7DE, United Kingdom
[2] Defence, Evaluation and Research Agency, St. Andrews Road, Worcestershire WR14 3PS, United Kingdom
[3] Department of Chemistry, University of Salford, Salford M5 4WT, United Kingdom
来源：
Advanced Materials | 2000年 / 12卷 / 07期
关键词：
Auger electron spectroscopy - Carbon - Film growth - High temperature operations - Magnesium compounds - Structure (composition) - Synthesis (chemical) - Thin films - X ray crystallography;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
The tetrameric magnesium complex [Mg(thd)(μ3-OMe)(MeOH)]4 (thd = 2,2,6,6-tetramethylheptane-3,5-dionate), 1, has been synthesized and its structure determined by X-ray crystallography. Thin films of magnesium oxide, MgO, have been deposited by liquid-injection MOCVD using tetrahydrofuran solutions of 1. The films were deposited at substrate temperatures of between 500 and 600°C and, under optimum growth conditions, were shown by Auger electron spectroscopy to be pure magnesium oxide with no detectable carbon.
引用
收藏
页码：71 / 75
相关论文
共 50 条
  • [1] Synthesis and structural characterization of a novel magnesium β-diketonatoalkoxide complex:: A new precursor for the MOCVD of MgO
    Davies, HO
    Jones, AC
    Leedham, TJ
    Crosbie, MJ
    Wright, PJ
    Boag, NM
    Thompson, JR
    CHEMICAL VAPOR DEPOSITION, 2000, 6 (02) : 71 - 75
  • [2] Synthesis and characterization of MOCVD precursor Fe(DPM)3
    Wang Yan-Yan
    Jiang Yin-Zhu
    Gao Jian-Feng
    Liu Ming-Fei
    Meng Guang-Yao
    CHINESE JOURNAL OF INORGANIC CHEMISTRY, 2006, 22 (07) : 1269 - 1274
  • [3] Synthesis and Structural Characterization of Some New Magnesium Formamidinates
    Cole, Marcus L.
    Junk, Peter C.
    ZEITSCHRIFT FUR ANORGANISCHE UND ALLGEMEINE CHEMIE, 2015, 641 (15): : 2624 - 2629
  • [4] Synthesis and characterization of Sm(DPM)3 used as precursor for MOCVD
    Jiang, YZ
    Song, HZ
    Li, L
    Bao, WT
    Meng, GY
    JOURNAL OF CRYSTAL GROWTH, 2004, 267 (1-2) : 256 - 262
  • [5] Synthesis and Characterization of Pr（DPM）3 Served as Precursor for MOCVD
    LIU Ming-fei
    Chemical Research in Chinese Universities, 2007, (03) : 258 - 262
  • [6] Synthesis and characterization of Pr(DPM)3 served as precursor for MOCVD
    Liu Ming-fei
    Hu Yong-xing
    Jiang Yin-zhu
    Gao Jian-feng
    Wang Yan-yan
    Meng Guang-yao
    CHEMICAL RESEARCH IN CHINESE UNIVERSITIES, 2007, 23 (03) : 258 - 262
  • [7] Synthesis and characterization of low-melting, highly volatile magnesium MOCVD precursors and their implementation in MgO thin film growth
    Wang, L
    Yang, Y
    Ni, J
    Stern, CL
    Marks, TJ
    CHEMISTRY OF MATERIALS, 2005, 17 (23) : 5697 - 5704
  • [8] Synthesis, structural characterization, and transmetalation reactions of a tetranuclear magnesium silsesquioxane complex
    Hanssen, RWJM
    Meetsma, A
    van Santen, RA
    Abbenhuis, HCL
    INORGANIC CHEMISTRY, 2001, 40 (16) : 4049 - 4052
  • [9] Synthesis, structural characterization and thermal properties of a new Cd(II) complex: As bithiazole precursor for preparation of CdS nanoparticles
    Hosseinian, Akram
    Mahjoub, Ali Reza
    JOURNAL OF MOLECULAR STRUCTURE, 2011, 985 (2-3) : 270 - 276
  • [10] Synthesis and structural characterization of a new heterobimetallic coordination complex of barium and cobalt for use as a precursor for chemical vapor deposition
    Tahir, AA
    Molloy, KC
    Mazhar, M
    Kociok-Köhn, G
    Hamid, M
    Dastgir, S
    INORGANIC CHEMISTRY, 2005, 44 (25) : 9207 - 9212
12345