Maskless selective epitaxial growth on patterned GaAs substrates by metallorganic chemical vapor deposition

被引：0
|
作者：
Son, Chang-Sik [1 ]
Park, Young K. [1 ]
Kim, Seong-Il [1 ]
Kim, Yong [1 ]
Kim, Eun Kyu [1 ]
Min, Suk-Ki [1 ]
Choi, In-Hoon [1 ]
机构：
[1] Korea Univ, Seoul, Korea, Republic of
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes & Review Papers | 1998年 / 37卷 / 4 A期
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页码：1701 / 1703
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