Maskless selective epitaxial growth on patterned GaAs substrates by metallorganic chemical vapor deposition

被引：0
|
作者：
Son, Chang-Sik [1 ]
Park, Young K. [1 ]
Kim, Seong-Il [1 ]
Kim, Yong [1 ]
Kim, Eun Kyu [1 ]
Min, Suk-Ki [1 ]
Choi, In-Hoon [1 ]
机构：
[1] Korea Univ, Seoul, Korea, Republic of
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes & Review Papers | 1998年 / 37卷 / 4 A期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：1701 / 1703
相关论文
共 50 条
  • [11] Toward epitaxial growth of CuGaS2 on GaAs(001) substrates by chloride chemical vapor deposition
    Pu, Yong Shen
    Kato, Takamasa
    Matsumoto, Takashi
    Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 1992, 31 (10): : 3420 - 3421
  • [12] Selective chemical vapor deposition of copper on AZ 5214™-patterned silicon substrates
    Davazoglou, D
    Vidal, S
    Gleizes, A
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2001, 19 (03): : 759 - 761
  • [13] SELECTIVE EPITAXIAL GAAS VAPOR GROWTH
    ISHIBASHI, Y
    YAMAGUCHI, M
    UCHIDA, M
    REVIEW OF THE ELECTRICAL COMMUNICATIONS LABORATORIES, 1974, 22 (11-1): : 1035 - 1042
  • [14] Growth of ZnSe/GaAs and ZnSe/Ge using atmospheric pressure metallorganic chemical vapor deposition
    Abdel-Motaleb, IM
    Pal, S
    Desai, P
    ELECTROCHEMICAL AND SOLID STATE LETTERS, 2000, 3 (06) : 293 - 296
  • [15] Atom beam-irradiation effects on selective epitaxial growth of GaAs by metalorganic chemical vapor deposition
    Yamaguchi, Ko-ichi, 1600, (28):
  • [16] A THEORY FOR METALORGANIC VAPOR-PHASE EPITAXIAL SELECTIVE GROWTH ON PLANAR PATTERNED SUBSTRATES
    FUJII, T
    EKAWA, M
    YAMAZAKI, S
    JOURNAL OF CRYSTAL GROWTH, 1995, 146 (1-4) : 475 - 481
  • [17] SELECTIVE VAPOR-PHASE DEPOSITION ON PATTERNED SUBSTRATES
    CARLSSON, JO
    CRITICAL REVIEWS IN SOLID STATE AND MATERIALS SCIENCES, 1990, 16 (03) : 161 - 212
  • [18] METALORGANIC CHEMICAL VAPOR-DEPOSITION GROWTH OF CD1-YZNYTE EPITAXIAL LAYERS ON GAAS AND GAAS/SI SUBSTRATES
    AHLGREN, WL
    JOHNSON, SM
    SMITH, EJ
    RUTH, RP
    JOHNSTON, BC
    KALISHER, MH
    COCKRUM, CA
    JAMES, TW
    ARNEY, DL
    ZIEGLER, CK
    LICK, W
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1989, 7 (02): : 331 - 337
  • [19] THE GROWTH OF GAAS ON SI SUBSTRATES BY METALORGANIC CHEMICAL VAPOR-DEPOSITION
    DUPUIS, RD
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1987, 134 (8B) : C484 - C484
  • [20] Lateral epitaxial overgrowth of GaSb on GaSb and GaAs substrates by metalorganic chemical vapor deposition
    Yi, SS
    Hansen, DM
    Inoki, CK
    Harris, DL
    Kuan, TS
    Kuech, TF
    APPLIED PHYSICS LETTERS, 2000, 77 (06) : 842 - 844
12345