Study on Magnesium Ionization in Cathodic Sputtering Glow Discharge Plasma

被引:0
|
作者
Shanghai Enhanced Lab. F., Shanghai University, 200072 Shanghai, China [1 ]
不详 [2 ]
不详 [3 ]
机构
来源
关键词
D O I
暂无
中图分类号
学科分类号
摘要
引用
收藏
相关论文
共 50 条
  • [31] OBSERVATION ON SPUTTERING SURFACE OF ALLOYS IN GLOW DISCHARGE
    REN Jianshi ZHAO Huilin ZHANG Gongshu Institute of Metal Research
    Acta Metallurgica Sinica(English Letters), 1990, (07) : 65 - 69
  • [32] Sputtering in a glow discharge lamp of the Grimm type
    Grais, KI
    Eid, MA
    Al-Ashkar, EA
    Eid, KA
    Abd-El-Aal, MS
    EUROPEAN PHYSICAL JOURNAL-APPLIED PHYSICS, 2003, 21 (03): : 213 - 223
  • [33] CAPACITANCE AND IMPEDANCE OF GLOW DISCHARGE IN RF SPUTTERING
    TSUI, RTC
    VACUUM, 1968, 18 (03) : 150 - &
  • [34] RF GLOW-DISCHARGE SPUTTERING MODEL
    LOGAN, JS
    KELLER, JH
    SIMMONS, RG
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1977, 14 (01): : 92 - 97
  • [35] SPUTTERING RATES OF ALLOYS IN GLOW-DISCHARGE
    REN, JS
    ZHANG, GS
    WANG, ZS
    ZHAO, JW
    JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY, 1995, 11 (04) : 295 - 298
  • [36] Correlation between plasma glow intensity distribution and sputtering profile in dc magnetron discharge
    Pal, A. F.
    Ryabinkin, A. N.
    Serov, A. O.
    XXXIII INTERNATIONAL CONFERENCE ON EQUATIONS OF STATE FOR MATTER, 2019, 1147
  • [37] SURFACE-FEATURES OF CONDUCTORS ERODED BY SPUTTERING IN A MAGNETRON GLOW-DISCHARGE PLASMA
    DEHGHAN, K
    SHI, Z
    WOODRUM, TH
    BREWER, S
    SACKS, R
    APPLIED SPECTROSCOPY, 1994, 48 (05) : 553 - 560
  • [38] Study of plasma characteristics of hollow cathode in glow discharge
    Qiu, Yanzhao
    Yu, Lu
    Zhou, Jindong
    Zhu, Huilong
    Yang, Danning
    Yu, Linshan
    Chen, Rui
    Zhang, Chengyuan
    Ni, Ruian
    Li, Qinghua
    Wu, Hongyan
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2023, 56 (48)
  • [39] Glow plasma jet - experimental study of a transferred atmospheric pressure glow discharge
    Guerra-Mutis, MH
    Pelaez, CV
    Cabanzo, R
    PLASMA SOURCES SCIENCE & TECHNOLOGY, 2003, 12 (02): : 165 - 169
  • [40] PLASMA DIAGNOSTICS OF SPUTTERING GLOW DISCHARGES
    COBURN, JW
    KAY, E
    SOLID STATE TECHNOLOGY, 1971, 14 (12) : 49 - &