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- [5] Investigation on the interfacial reaction of SiO2/Ti0.1 W0.9 system Journal of Non-Crystalline Solids, 1995, 187
- [6] The effects of boron in the Cu(B)/Ti/SiO2 system on the Cu-Ti reaction, resistivity, and diffusion barrier properties Journal of Electronic Materials, 2005, 34 : 643 - 646
- [9] Effects of Ti addition on the morphology, interfacial reaction, and diffusion of Cu on SiO2 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2002, 20 (06): : 2361 - 2366
- [10] REACTION-KINETICS OF SPUTTER-DEPOSITED TI ON SIO2 SUBSTRATES DURING RAPID THERMAL ANNEALING RAPID THERMAL ANNEALING / CHEMICAL VAPOR DEPOSITION AND INTEGRATED PROCESSING, 1989, 146 : 255 - 260