ON THE ANGULAR DISTRIBUTION OF SPUTTERED PARTICLES.

The distribution function describing the space, angle and energy dependence of particles in an ion bombarded amorphous target is calculated by solving the forward transport equation in a DP//L-approximation (L less than equivalent to 3). Hard sphere interaction is employed. Infinite medium and half space boundary conditions are used. Special attention is given to the energy and angle dependence at the very surface of the target. In contrast to the flux in an infinite medium, the angular distribution at the boundary of a half space displays an overcosine distribution, which is asymptotically stable at arbitrarily high impact energies. Comparison with experiment is forwarded.