THERMODYNAMIC ANALYSIS OF THE CHEMICAL VAPOR DEPOSITION OF COMPOSITE LT AN BR Si3N4 RT AN BR LT AN BR BN RT AN BR COATINGS.

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Besmann, T.M. [1 ]
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[1] Oak Ridge Natl Lab, Chemical, Technology Div, Oak Ridge, TN, USA, Oak Ridge Natl Lab, Chemical Technology Div, Oak Ridge, TN, USA
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