Stresses in 3C-SiC films grown on Si substrates

被引：0
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作者：
Jacob, Chacko [1 ]
Pirouz, Pirouz [1 ]
机构：
[1] Case Western Reserve Univ, Cleveland, United States
来源：
IEEE Semiconducting and Semi-Insulating Materials Conference, SIMC | 1999年
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摘要：
13
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页码：275 / 278
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