Temperature compensating an integrated pressure sensor

被引:0
|
作者
Paillard, B. [1 ]
机构
[1] The Univ of Sherbrooke, Sherbrooke, Canada
来源
Sensors (Peterborough, NH) | 1998年 / 15卷 / 01期
关键词
D O I
暂无
中图分类号
学科分类号
摘要
(Edited Abstract)
引用
收藏
页码:36 / 37
相关论文
共 50 条
  • [21] Temperature, pressure, and humidity SAW sensor based on coplanar integrated LGS
    Liang, Xiaorui
    Zhang, Lei
    Tan, Qiulin
    Cheng, Wenhua
    Hu, Dan
    Li, Shuang
    Jing, Lin
    Xiong, Jijun
    MICROSYSTEMS & NANOENGINEERING, 2023, 9 (01)
  • [22] High-Temperature Self-Compensating Absolute Micro-Pressure Sensor and Its Testing Method
    Sun, Boshan
    Xiong, Jijun
    Fang, Zhihong
    Gao, Lixia
    Xu, Aodi
    Jia, Pengyu
    Feng, Qiyun
    Li, Chen
    IEEE SENSORS JOURNAL, 2023, 23 (07) : 7570 - 7577
  • [23] A monolithic integrated pressure sensor
    Zhang, Zhengyuan
    Yang, Cao
    Mei, Yong
    Feng, Zhicheng
    Li, Xiaogang
    Li, Jiangen
    Hu, Guoxiang
    MICRO-NANO TECHNOLOGY XIII, 2012, 503 : 8 - +
  • [24] A PIEZORESISTIVE INTEGRATED PRESSURE SENSOR
    YAMADA, K
    NISHIHARA, M
    KANZAWA, R
    KOBAYASHI, R
    SENSORS AND ACTUATORS, 1983, 4 (01): : 63 - 69
  • [25] Application of a Temperature-Compensating FBG Sensor to Strain Measurement
    Jung, Dal-Woo
    Kwon, Il-Bum
    Choi, Nak-Sam
    ADVANCED MATERIALS AND PROCESSING, 2007, 26-28 : 1089 - +
  • [26] Nanoresonator Integrated Fiber Optics Sensor for Pressure Immune Temperature Sensing Application
    Guan, Zizhong
    Jia, Xiangjie
    Li, Min
    Li, Mingyu
    Wen, Xiaoyan
    Deng, Shuo
    Liu, Sisi
    Ho, Ho-Pui
    Lu, Haifei
    IEEE SENSORS JOURNAL, 2023, 23 (07) : 6880 - 6885
  • [27] LOW-COST HIGH-SENSITIVITY INTEGRATED PRESSURE AND TEMPERATURE SENSOR
    PONS, P
    BLASQUEZ, G
    SENSORS AND ACTUATORS A-PHYSICAL, 1994, 42 (1-3) : 398 - 401
  • [28] Integrated optical micromachined pressure sensor with spectrally encoded output and temperature compensation
    De Brabander, GN
    Beheim, G
    Boyd, JT
    APPLIED OPTICS, 1998, 37 (15): : 3264 - 3267
  • [29] An Integrated Fiber Optic Sensor Capable of Simultaneously Measuring of Salinity, Pressure, and Temperature
    Feng, Chengcheng
    Meng, Lingzhi
    Wang, Hongye
    Wang, Donghui
    Niu, Hao
    Wei, Liuxia
    Ju, Tao
    Yang, Shitai
    Yuan, Libo
    JOURNAL OF LIGHTWAVE TECHNOLOGY, 2024, 42 (14) : 5009 - 5016
  • [30] A Low Temperature Drifting Acoustic Wave Pressure Sensor with an Integrated Vacuum Cavity for Absolute Pressure Sensing
    Wang, Tao
    Tang, Zhengjie
    Lin, Huamao
    Zhan, Kun
    Wan, Jiang
    Wu, Shihao
    Gu, Yuandong
    Luo, Wenbo
    Zhang, Wanli
    SENSORS, 2020, 20 (06)