Characteristics of material for photoresist spin coating: Property for reduction of photoresist consumption

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作者：
Sanada, Masakazu [1 ]
Nakano, Kayoko [1 ]
Matsunaga, Minobu [1 ]
机构：
[1] Dainippon Screen Mfg. Co Ltd, Kyoto, Japan
来源：
| 1998年 / JJAP, Tokyo, Japan卷 / 37期
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