Thin-film boron-doped polycrystalline silicon70%-germanium30% for thermopiles

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IMEC, MAP MS-division, Kapeldreef 75, 3001 Leuven, Belgium [1 ]
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Sens Actuators A Phys | / 1-3卷 / 325-329期
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Number:; -; Acronym:; IWT; Sponsor: Agentschap voor Innovatie door Wetenschap en Technologie;
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