Properties of the carbon polymer films produced with the help of arc discharge on hollow cathode

被引：0

作者：

Eruzin, A.A. ^{[1
]}

Afanas'ev, V.N. ^{[1
]}

Gavrilenko, I.B. ^{[1
]}

Udalov, Yu.P. ^{[1
]}

机构：

[1] Gos. Tekhnol. Inst., Sankt-Peterburg, Russia

来源：

Fizika i Khimiya Obrabotki Materialov | 2003年 / 04期

关键词：

Carbon - Electric arcs - Films - Metals - Substrates;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

Optimal conditions for carbon films deposition on the metal substrates under arc discharge on hollow cathode in acetylene have been determined. The carbon films have a variable composition of 'carbene' material with CH0.25-CH0.8 empirical formula. Obtained dielectric film growth rate is dependent on the substrate material, and an electric resistance of the films is increased with their thickness increase.

引用

页码：28 / 30

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